http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018150182-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f9af914ed2fb00cd4f1b8b1a28964e4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-04 |
| filingDate | 2017-03-09^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_974e7aeb8ac497ad35e7f4a205967da2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a79062c05fc202b61faff00f174811ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f5aea29418cbb7fd630535c50939bc3 |
| publicationDate | 2018-09-27^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018150182-A |
| titleOfInvention | Cyclic hydrogenated silane with low halogen content |
| abstract | Provided is a cyclic hydrogenated silane used for producing a silicon film by various methods, wherein the halogen element content is reduced. A method for producing a cyclic hydrogenated silane represented by formula (1) having a halogen element content of 100 ppm or less (including 0 ppm) on a mass basis (the cyclic hydrogenated silane itself is not particularly limited). Although various known production methods can be employed, a cyclic hydrogenated silane, preferably a method of reducing the obtained cyclic halosilane by cyclizing the halosilane, preferably a cyclic hydrogen wherein the halogen element is chlorine Silane (SiH 2 ) n (1) n is an integer of 3 to 8) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7229817-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7104584-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020147463-A |
| priorityDate | 2017-03-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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