Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5663 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D5-24 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5663 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P1-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 |
filingDate |
2017-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9db2852cd431d4410b040a940e3cd404 |
publicationDate |
2019-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2019035589-A |
titleOfInvention |
Physical quantity sensor, inertial measurement unit, electronic device, and moving object |
abstract |
The present invention provides a physical quantity sensor in which temperature hysteresis of a physical quantity is reduced and detection accuracy is improved. A physical quantity sensor (1) includes a sensor element (acceleration sensor element (20)), a container (package (7)) including a housing part (concave part (17a)) including an inner bottom surface (11h) to which the sensor element is attached, and a sensor element. A circuit element (IC40) attached to the surface opposite to the inner bottom surface 11h side and electrically connected to the sensor element, and a bottom plate (first base material 11) including the inner bottom surface 11h of the container. The GND pattern 30 is provided apart from the inner bottom surface 11h. [Selection] Figure 2 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10919758-B2 |
priorityDate |
2017-08-10^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |