http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019035589-A

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filingDate 2017-08-10^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9db2852cd431d4410b040a940e3cd404
publicationDate 2019-03-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2019035589-A
titleOfInvention Physical quantity sensor, inertial measurement unit, electronic device, and moving object
abstract The present invention provides a physical quantity sensor in which temperature hysteresis of a physical quantity is reduced and detection accuracy is improved. A physical quantity sensor (1) includes a sensor element (acceleration sensor element (20)), a container (package (7)) including a housing part (concave part (17a)) including an inner bottom surface (11h) to which the sensor element is attached, and a sensor element. A circuit element (IC40) attached to the surface opposite to the inner bottom surface 11h side and electrically connected to the sensor element, and a bottom plate (first base material 11) including the inner bottom surface 11h of the container. The GND pattern 30 is provided apart from the inner bottom surface 11h. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10919758-B2
priorityDate 2017-08-10^^<http://www.w3.org/2001/XMLSchema#date>
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