http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019068587-A

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filingDate 2017-09-29^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-04-25^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2019068587-A
titleOfInvention Control device of piezoelectric drive device and control method of piezoelectric drive device
abstract A control device of a piezoelectric drive device capable of detecting a vibration state with high accuracy and a control method of the piezoelectric drive device are provided. A control device of a piezoelectric drive device includes a drive pulse signal generation unit that generates a binarized drive pulse signal, and a drive signal that generates a drive signal to be applied to a drive piezoelectric element from the drive pulse signal. A generation unit, a detection pulse signal generation unit that generates a detection pulse signal by binarizing a detection signal output from the detection piezoelectric element, rising and falling of the drive pulse signal, rising of the detection pulse signal, and And a phase difference acquisition unit that acquires a phase difference between the drive pulse signal and the detection pulse signal based on the falling edge. [Selected figure] Figure 7
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