| abstract |
PROBLEM TO BE SOLVED: To provide a thermistor having a good thermistor film using a metal substrate and having high moisture resistance, heat resistance, etc., a method for manufacturing the thermistor, and a thermistor sensor. SOLUTION: A metal base 2, an insulating base film 3 formed on the metal base, and a thermistor film 4 formed on the insulating base film, the insulating base film being a metal The surface roughness of the insulating base film is smaller than the surface roughness of the metal substrate. Method of making a thermistor includes the steps of applying a polysilazane onto a metal substrate, forming an insulating base film SiO x containing the N dried polysilazane, thermistor film on an insulating base film Forming a film. [Selection] Figure 1 |