| abstract |
A technique for suitably cooling an object to be processed mounted on a mounting table is provided. A cooling system according to an embodiment includes a heat exchange unit, a supply line for sending refrigerant to the heat exchange unit, a discharge line for sending refrigerant discharged from the heat exchange unit, and a refrigerant gas. The first gas-liquid separator to the n-th gas-liquid separator connected in series in the gas line, and the first cooling line to the first cooling line extending through the first gas-liquid separator to the n-th gas-liquid separator, respectively. n cooling lines, and both ends of the first cooling line are connected to a cooling device, and each of the second cooling line to the nth cooling line is connected to each of the second gas liquid separating unit to the nth gas liquid separating unit. Each of the first liquid line to the (n-1) th liquid line and the discharge line for discharging the refrigerant from the heat exchange unit, and each of the first gas-liquid separation unit to the n-th gas-liquid separation unit. Is connected to the liquid line, which is connected to the heat exchanger. Communicating with the line. [Selection] Figure 1 |