http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020529335-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0338 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0112 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0058 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 |
| filingDate | 2018-07-30^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-10-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020529335-A |
| titleOfInvention | Micromechanical device and its manufacturing method |
| abstract | The present invention provides a micromechanical device and a method for manufacturing the same. The micromechanical device (1) includes a base substrate (2) having a front surface (V) and a back surface (R) and a cap substrate (2a), and the front surface (V) of the base substrate (2). ), At least one annular trench (3) having an uneven side wall (3a) is formed, and the front surface (V) and the trench (3) of the base substrate (2) are at least one metal. The metal layer (4, 4a) is covered by the layers (4, 4a) so that the uneven side wall (3a) of the trench (3) does not form a current path in the direction perpendicular to the front surface (V). It is irregularly coated by 4, 4a), and in the region of the trench (3), a sealing means, particularly a sealing glass sealant (5), is placed between the base substrate (2) and the cap substrate (2a). Is formed in. |
| priorityDate | 2017-08-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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