| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F24F3-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D22-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F6-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F24F3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D22-02 |
| filingDate |
1999-08-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-01-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-01-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3127401-B2 |
| titleOfInvention |
Constant temperature and constant humidity air supply method and apparatus for semiconductor equipment |
| priorityDate |
1999-06-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |