| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B20-383 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-565 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-112
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| filingDate |
1998-06-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-02-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-02-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3137077-B2 |
| titleOfInvention |
Semiconductor device and manufacturing method thereof |
| priorityDate |
1998-06-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |