http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3143309-U
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K11-30 |
| filingDate | 2008-05-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3143309-U |
| titleOfInvention | Lower electrode unit with set defect detection function |
| abstract | There is provided a lower electrode unit with a set defect detection function capable of sufficiently cooling a lower electrode without an upper portion of a lower electrode holder being enlarged. A lower electrode unit with a set defect detection function mainly includes a lower electrode, a lower electrode holder, a guide pin, a shaft, a housing, a cylinder, and a length measuring unit. . The lower electrode holder 2 is divided into upper and lower parts, the upper side is the water cooling unit 10, the lower side is the power feeding unit 20, and a cooling water channel through which the cooling water flows is formed in the water cooling unit 10. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014223662-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015083314-A |
| priorityDate | 2008-05-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 |
Showing number of triples: 1 to 14 of 14.