http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3369622-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 1993-03-12^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-01-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-01-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3369622-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| priorityDate | 1992-03-13^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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