http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3658922-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate | 1997-05-22^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2005-06-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3658922-B2 |
| titleOfInvention | Plasma processing method and apparatus |
| priorityDate | 1997-05-22^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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