| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2204-08 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C19-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 |
| filingDate |
2001-04-20^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-09-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-3975321-B2 |
| titleOfInvention |
Silica glass substrate for photomask and method for planarizing silica glass substrate for photomask |
| priorityDate |
2001-04-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |