http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4279237-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2004-11-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-06-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-06-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4279237-B2 |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| priorityDate | 2004-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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