http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5238529-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2009-01-26^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5238529-B2 |
| titleOfInvention | Positive resist composition and resist pattern forming method |
| priorityDate | 2009-01-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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