http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5263947-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30 |
| filingDate | 2008-10-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-08-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5263947-B2 |
| titleOfInvention | Surface shape measuring device and measuring method |
| abstract | <P>PROBLEM TO BE SOLVED: To provide a device and method for stably measuring the surface shape while eliminating the effect of static charge and without causing a change in the surface of an active object to be measured in measuring the surface shape using a scanning type probe microscope. <P>SOLUTION: The scanning type probe microscope 100 has a measurement probe 104a for scanning the surface of a sample 101 to be measured, and a solution 102 is provided between the sample 101 to be measured and the measurement probe 104a over at least the measurement range of the sample 101 to be measured. The solution 102 is used for preventing the surface of the sample 101 to be measured and the measurement probe 104a from being charged and preventing a natural oxide film or organic material from growing or being adsorbed by the surface of the sample 101 to be measured. As the solution, for example, isopropyl alcohol (IPA) is cited, but a gas having the physical properties satisfying the above requirements may be used instead of the solution. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| priorityDate | 2008-10-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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