| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-49 |
| filingDate |
2008-10-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-11-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-11-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-5346946-B2 |
| titleOfInvention |
Microcavity plasma device with microcavity with non-uniform cross section |
| priorityDate |
2007-10-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |