http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5467371-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-30 |
| filingDate | 2011-12-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-04-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5467371-B2 |
| titleOfInvention | Inductively coupled plasma processing apparatus and inductively coupled plasma processing method |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9601330-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014045547-A1 |
| priorityDate | 2011-12-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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