http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5556452-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F126-02 |
| filingDate | 2010-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-07-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-23^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5556452-B2 |
| titleOfInvention | Pattern formation method |
| priorityDate | 2010-07-06^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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