http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5593667-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2009-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-09-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-09-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-5593667-B2 |
| titleOfInvention | Negative resist composition, pattern forming method using the negative resist composition, and electronic component |
| priorityDate | 2009-04-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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