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filingDate 2015-09-04^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2016-06-29^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-5942027-B2
titleOfInvention Method for producing cyclic silane intermediate and method for producing cyclic hydrogenated silane or cyclic organosilane
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