http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6230954-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2014-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6230954-B2 |
| titleOfInvention | Etching method |
| priorityDate | 2014-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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