http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6318601-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2013-12-19^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-05-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6318601-B2 |
| titleOfInvention | Method for producing resist pattern |
| priorityDate | 2013-12-19^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Showing number of triples: 1 to 256 of 256.