http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6439270-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-04 |
| filingDate | 2014-04-17^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-12-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-12-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6439270-B2 |
| titleOfInvention | Lithographic polymer manufacturing method, resist composition manufacturing method, and pattern-formed substrate manufacturing method |
| priorityDate | 2013-05-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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