http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7041638-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2019-01-10^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7041638-B2 |
| titleOfInvention | Polishing equipment |
| priorityDate | 2019-01-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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