http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01197303-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1476752f2420c8f8eb53464cf7fc922b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B12-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
| filingDate | 1988-01-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_203f87dfaebc38430d5cde3f4ef8c258 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac7bdd174934fbd36f3c4baa780ed886 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_665b6d05a9d9b3cf7c7920db72fe15a1 |
| publicationDate | 1989-08-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H01197303-A |
| titleOfInvention | Production of multiple oxide thin film |
| abstract | PURPOSE:To easily obtain the title dense thin film having a desired thickness and small particle size, in a short process, by applying a soln. obtd. by dissolving polymerizable org. acid salts of each metal constituting the targeted substance, in a specified molar ratio, on a heat-resisting substrate, thereafter by curing by heating or irradiating with UV ray and by calcining. CONSTITUTION:The soln. for forming the thin film is obtd. by dissolving the polymerizable org. acid salts [e.g., (meth)acrylic acid salt, maleic acid salt] of each metal constituting the multiple oxide, as the targeted substance, having perovskite structure, such as CaTiO3, SrSnO3, CaZrO3, PbTiO2, YAlO3, in the specified molar ratio in a solvent and, as occasion demands, by adding an initiator. Then, the soln. is applied on the heat-resisting substrate such as alumina, the formed film coated in the desired thickness is cured by heating or irradiating with UV ray and the obtd. cured film is calcined to obtain the title thin film having <=1mu thickness. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583270-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02118077-A |
| priorityDate | 1988-01-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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