| abstract |
PURPOSE: To improve cooling performance and durability by overlapping a molybdenum flat plate on a grooved molybdenum plate via titanium, diffusion- connecting them under the conditions in the temperature range 900-1100°C which is the recrystallization temperature of molybdenum or below and in the face pressure range 1.0-3.0kgf/mm 2 , then boring a beam hole. n CONSTITUTION: A molybdenum flat plate 3 is overlapped to cover grooves 4 on a grooved molybdenum plate 1 provided with grooves 4 for refrigerant passages via titanium 2, and they are diffusion-connected under the pressurizing conditions in the temperature range 900-1100°C and in the face pressure range 1.0-3.0kgf/mm 2 . The grooved molybdenum plates 1 and the molybdenum flat plate 3 are integrally fixed, then a beam hole 5 is machined. Cooling water passages can be precisely provided at optional positions around the beam hole, and a connection body with high adhesion is obtained because it is connected at the recrystallization temperature or below via titanium. An electrode plate made of molybdenum can obtain high cooling performance, and the durability of the electrode plate is improved. n COPYRIGHT: (C)1990,JPO&Japio |