http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0261482-A

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filingDate 1988-08-24^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1990-03-01^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H0261482-A
titleOfInvention Method and device for manufacturing ultra-high purity nitrogen
abstract PURPOSE:To collect ultra-high purity nitrogen containing the oxygen content of less than 1ppb by a method wherein a nitrogen circulating circuit consisting of a nitrogen booster, a nitrogen heat exchanger, an auxiliary fractionating tower and an auxiliary condenser is provided to introduce nitrogen gas, roughly fractionated in a fractionating tower, into the lower part of the auxiliary fractionating tower and fractionate it further. CONSTITUTION:Material air is cooled in an air heat exchanger 4 and enters into the lower part of a fractionating tower 5 under a condition that one portion thereof is liquefied. One portion of nitrogen in the upper part of the fractionating tower 5 is introduced into the lower part of an auxiliary fractionating tower 10 through a conduit 9 in the condition of liquid. Subsequently, liquid nitrogen, taken out of the lower part of the auxiliary fractionating tower 10, is gasified in an auxiliary condenser 14 and is boosted by a nitrogen booster 11 in order to produce the ascending gas and circulating liquid of the auxiliary fractionating tower 10, then, is cooled by a nitrogen heat exchanger 13 after being cooled by an after cooler 12 to return it into the lower part of the auxiliary fractionating tower 10. Ultra-high purity nitrogen gas, taken out of the upper part of the auxiliary fractionating tower 10, recovers the temperature thereof to a normal temperature by the air heat exchanger 4 through a conduit 16 and is collected as the ultra-high purity nitrogen.
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