http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0266915-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F10-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-22 |
| filingDate | 1988-09-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e4c608f70ce1572af1976fd1d3db90b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5c9462eaa677f42794b112f606e5052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f728fab5c88356e1afc79b28f70d980d |
| publicationDate | 1990-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0266915-A |
| titleOfInvention | Manufacture of single crystalline magnetic thin film |
| abstract | PURPOSE: To synthesize a single crystalline magnetic garnet film having a large Faraday rotary angle at a low temperature of 400°C or lower by introducing vapor of compound containing iron, bismuth and rare earth element, and oxygen gas into a chamber evacuated down to a predetermined value, and forming a thin film by utilizing an ion impact effect due to the activity of high density plasma and the application of a bias voltage in a magnetron discharge or a plasma generated by an electron cyclotron resonance. n CONSTITUTION: Vapor of compound containing Fe, Bi, rare earth element, reaction gas from a reaction gas cylinder 12, oxygen are introduced together with nitrogen from a carrier gas cylinder from vaporizers 7, 8, 9 containing materials into a reaction chamber 1 evacuated by an evacuation system 3 down to 10-10 4 Torr. A magnetic field is applied by an electromagnet 5 to generate a plasma, a negative electric field is applied from a bias power source to a board 4 to react under reduced pressure, and a film is formed on a heated glass board. According to this method, since ion impact is received by the board bias by utilizing high energy particles in the plasma, a single crystal having large Faraday rotary angle can be obtained at a low temperature. n COPYRIGHT: (C)1990,JPO&Japio |
| priorityDate | 1988-09-01^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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