http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04120277-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1990-09-10^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c53495b89fa6c3f2257f1d81afdebaa7 |
| publicationDate | 1992-04-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04120277-A |
| titleOfInvention | Plasma cvd device |
| abstract | PURPOSE: To intensify and uniformize the electric field near an electrode and to form a large-area thin film at a high speed with the above device which forms an amorphous film on a substrate parallel with an electrode for discharge by forming the electrode for discharge of a spiral type plane type coil. n CONSTITUTION: The rectangular spiral type plane coil electrode 11 for generating glow discharge plasma is disposed in a reaction vessel 1. The electrode 11 has a structure consisting of a wire wound at specified intervals to a rectangular shape. The inside of the reaction vessel 1 is evacuated by a vacuum pump 9 and a gaseous mixture composed of monosilane and Ar is supplied through a reaction gas introducing pipe 7 to maintain the inside of the vessel 1 at a prescribed pressure. A voltage is impressed from a high-frequency power source 14 to the electrode 11 via an impedance matching circuit 12. The glow discharge plasma is generated around the electrode 11 in this way. The emitted light exhibits approximately uniform intensity between the electrode 11 and the substrate 10 and, therefore, the amorphous Si thin film deposited the surface of the substrate 10 has a uniform film thickness distribution. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9722141-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6189485-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001516944-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5690781-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5500256-A |
| priorityDate | 1990-09-10^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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