http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04285817-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C13-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-692 |
| filingDate | 1991-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d776e7153702fff8ba575a459b87370 |
| publicationDate | 1992-10-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04285817-A |
| titleOfInvention | Thermal type flow sensor |
| abstract | PURPOSE: To attain miniaturization of an element and improvement of mass- productivity without lowering the precision in detection of a flow rate, by a method wherein a thermal insulation layer constituted of glass glaze is formed in a part on an alumina substrate and a heating resistor and a temperature measuring resistor are provided on the same substrate so that they are insulated thermally from each other. n CONSTITUTION: In a sensor to be employed for an automobile, a household electrified product and an industrial instrument, glass paste of alkaline earth borosilicate is printed on a part of an alumina substrate 5 and baked at a prescribed temperature, so that a thermal insulation layer 6 be formed. Moreover, Ni is applied to be a film thereon by vacuum evaporation, and a heating resistor 1 is formed on the thermal insulation layer 6 and a temperature measuring resistor 2 on the alumina substrate 5 respectively by sputter etching. Thereby a sensor element is made to have a structure wherein the heating resistor 1 is disposed in one end of the alumina substrate 4 and the temperature measuring resistor 2 in the other end. Since they are formed on the same substrate, miniaturization of the element and improvement of mass-productivity can be attained. n COPYRIGHT: (C)1992,JPO&Japio |
| priorityDate | 1991-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226 |
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