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publicationDate 1993-07-09^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H05170405-A
titleOfInvention Method for removing impurities from hydride gas
abstract (57) [Summary] [Object] To provide a method for removing impurities from an impurity-containing hydrogenated gas such as silane containing disiloxane without decomposing the hydride gas. [Structure] To remove impurities, a gas containing impurities is brought into contact with a hydrogenated getter metal, for example, a Zr-V-Fe getter alloy.
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