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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1333
filingDate 1993-06-10^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5cb7bc4770e765ec558afb6dd11b087
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5a475882a401694bdcd663be4185577
publicationDate 1994-12-20^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H06346025-A
titleOfInvention Coating composition
abstract (57) [Summary] [Structure] A coating composition containing a siloxane polymer obtained by hydrolyzing and condensing a hydrolyzable group-containing silane mixture and a film curing agent, wherein the silane mixture is a bifunctional silane. A coating composition comprising a mixture containing 1 to 20 mol of a trifunctional silane with respect to 1 mol. The coating composition of the present invention has excellent crack resistance and can be suitably used as a buffer coat of a semiconductor device requiring a thick film, a flattening agent, or a protective film of a liquid crystal display.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008003624-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008170984-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004140342-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011084639-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11119261-A
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priorityDate 1993-06-10^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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