| abstract |
(57) [Summary] [Structure] Plasma C using at least an organic silicon compound gas and oxygen as raw materials for polymer film base materials such as polyether sulfone and polyether ether ketone. A gas barrier transparent conductive laminate, in which a silicon oxide layer formed by the VD method and a transparent conductive layer are appropriately laminated. [Effect] A transparent conductive film having transparency, flexibility, and high gas barrier property, which is suitable for application to a liquid crystal display device in which water vapor and oxygen must be avoided, is provided. |