| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6cfc033f059d282fcd915bc8be2ae53f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G75-0213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G75-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G75-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L81-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1994-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_324e78703870d6ab47366b22ed5d1469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9d9de780e10cb4ef9c5debd2586ef76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf6da9169836a56066ce01bdec3c05ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc3d76a8b3adc1def675699415e6ece6 |
| publicationDate |
1996-07-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08176438-A |
| titleOfInvention |
Photosensitive resin composition |
| abstract |
(57) [Summary] [Structure] In a photosensitive resin composition containing an alkali-soluble component and a photosensitive component, a polythioether represented by the following general formula (1) is essential as an alkali-soluble component. A photosensitive resin composition comprising 1 to 100% as a component. (In the formula, A represents a phenol or / and a naphthol residue, and n represents an integer of 0 to 100.) [Effect] The photosensitive resin composition of the present invention provides a fine pattern excellent in processing accuracy. It is suitable and contributes to higher density semiconductor device manufacturing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007077209-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002167436-A |
| priorityDate |
1994-12-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |