patent/JP-H08274399-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08274399-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ee12a05c7bf51327bc4b4f54e10bc88
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-104 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225
filingDate	1995-04-03^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d910ed715b1ed7d926e76e9aa0f3128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7664ef9c4b4709cdf63f97c07c9dc92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fe229ee57fe8186fb55f2bc3949a13d
publicationDate	1996-10-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-H08274399-A
titleOfInvention	Apparatus and method for controlling pulse energy of pulse laser device
abstract	(57) [Abstract] [Purpose] An object of the present invention is to realize a pulse energy control device capable of controlling pulse energy at high speed and with high accuracy. A pulse energy controller (5) determines a pulse energy value of a pulse required next from an exposure device (3). The pulse energy controller (5) commands an energy value to the pulse laser device (1) and controls the attenuator (2) to input a pulse having a predetermined pulse energy to the exposure device (3).
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013093577-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6424666-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6516012-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007096041-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007059788-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6141081-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6603788-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000077762-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6522681-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6421365-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7898646-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000058944-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001358064-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001307997-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6577665-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6501535-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014059250-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012165010-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004501384-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001230205-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6678291-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6795473-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9257809-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009123888-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015012099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012151495-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7403266-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4497650-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000340869-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6560254-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012084919-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008109132-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020037860-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015523739-A
priorityDate	1995-04-03^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID27722 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID27722 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8343 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522998

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