| abstract |
(57) Abstract: A method for minimizing corrosion in distribution of ultra high purity gas is provided. SOLUTION: The gas distribution network or a part thereof is wet-cleaned with a wet cleaner, and then acetone dimethyl acetal (DMP), 2,2-dichloropropane (DC P), 2,2-dibromopropane (DBP), their mixtures and H 2 is selected from the group consisting of equivalents O-desorption liquid desiccant is used for liquid drying, and the content of impurities is 1pp 5 x 10 4 after purging with dry high-purity gas that is less than m Exhaust at a pressure of less than Pa and expose to an atmosphere containing ultra-high purity corrosive gas or air. |