| abstract |
(57) [Summary] [Object] To provide a thin-film gas sensor and a method for manufacturing the same. [Structure] A porous electrode layer (anode 10), a proton conductive solid electrolyte deposition layer (proton conductive thin film 11) and a porous electrode layer (cathode 12) are sequentially laminated on a porous ceramic substrate (alumina substrate 8). And a thin-film gas sensor including a sensor element provided with a heating unit (platinum heater 9) and a platinum lead wire 13 if desired, and the porous electrode layer and the proton conductive solid electrolyte vapor deposition by vapor deposition method. A method for producing the same, which comprises forming a layer. [Effect] This sensor has extremely low resistance of electrolyte, excellent measurement accuracy and reproducibility, high reliability, simple structure, easy to obtain, and remarkably miniaturized. |