| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d953eeb72e9f19aecf474deecee9d36 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-05 |
| filingDate |
1996-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81886c30383f4763f616865f78f7e4e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56443dfd924552522796bee4e83498b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_526e0ea0d727b2f4351d8268eae29c46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0327e66b2157142cec831559253f5f95 |
| publicationDate |
1997-09-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H09246624-A |
| titleOfInvention |
Method of forming electronic circuit |
| abstract |
(57) 【Abstract】 PROBLEM TO BE SOLVED: To effectively promote photooxidation, to obtain high conductivity in a non-oxidized portion, to reduce the number of processing steps, and to reduce pattern accuracy and material contamination due to processing. Forming an electronic circuit that does not waste material. SOLUTION: The method for forming an electronic circuit is characterized by oxidizing a part of a thin film of solid polyorganosilane added with an onium salt and then doping with an oxidizing substance. |
| priorityDate |
1996-03-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |