http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09265933-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f481982f9992cbb527a6d31589832958 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N2-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q10-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2044 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 |
| filingDate | 1997-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af969aa4f5cce5b24ee25feb1e95d405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f17a404607e8ecb18ce5e0c6b3a320e5 |
| publicationDate | 1997-10-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09265933-A |
| titleOfInvention | Non-tilted plate actuator for use in micro positioners |
| abstract | (57) Abstract: The present invention relates to a micro-motion conversion positioner used for a micro-positioning device that controls the position of a probe tip with respect to the surface of a sample under observation, and an Abbe Offcet error. It is an object to provide an improved non-tilting positioner that eliminates. An actuator of the present invention includes a micro-motion transducer plate having a set of opposed parallel edges and a set of opposed parallel surfaces extending between the edges, and a first of the parallel edges. The second and second elements are respectively connected to the first element and the second element of the element to prevent relative movement between the elements, and a section divided into a plurality of sections. An electric field having a first polarity in one section and an electric field having a second polarity in another section is formed in a plate thickness direction with a first electrode and a second electrode arranged opposite to each other through a plate. It consists of control means. |
| priorityDate | 1996-02-09^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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