| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04 |
| filingDate |
1996-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29981be43fa44608f64dcec7c8a59a2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05b16859a509b63486801ef5bd6e001c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7728be5f5d6d072b69b5e7261e93b02 |
| publicationDate |
1998-03-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1071373-A |
| titleOfInvention |
Cleaning method |
| abstract |
(57) [PROBLEMS] To contact an object to be cleaned with a cleaning solvent mainly containing a silicone-based cleaning agent, and then to immerse the object in a rinsing cleaning bath mainly containing hydrofluorocarbon for rinsing. In the cleaning method, the object to be cleaned is immersed in a rinse cleaning bath to prevent the silicone-based cleaning agent from re-adhering when pulled up, thereby enhancing the rinse cleaning effect. SOLUTION: A high-purity hydrofluorocarbon is supplied to a rinsing bath to keep the rinsing bath uniform so that phase separation does not occur. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006223917-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6312759-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0022081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9851651-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4557742-B2 |
| priorityDate |
1996-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |