| abstract |
PROBLEM TO BE SOLVED: To purify a substituted hydrazine with high purity and to supply the purified substituted hydrazine to a semiconductor manufacturing apparatus by a method which is not restricted by a refining operation condition. [Constitution] Substituted hydrazine is brought into contact with a synthetic zeolite having a pore diameter of 3 mm in the gas phase, purified, cooled, liquefied and collected, and the liquid substituted hydrazine is vaporized and supplied to a semiconductor manufacturing apparatus in gaseous form. |