| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4af0df9a26ff4aafde7285cbd8eb12f4 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L15-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C67-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16H55-17 |
| filingDate |
1997-12-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03ee2a9fa412c52c280e9eae1d39abd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_249a7e8db9105a0d5436767d688d192b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73889e70b42f2293629e0fcf4806d041 |
| publicationDate |
1999-06-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11172412-A |
| titleOfInvention |
Manufacturing method of microstructure |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a microstructure capable of obtaining a microstructure having high resolution in a laminating direction, high bonding strength between thin films even with a small bonding load, and high mechanical strength. . A plurality of thin films having a surface roughness of 10 nm or less are formed on a substrate. The z-stage 7 is lowered to bring the dummy substrate 6 into contact with the first layer thin film 34 and press it with a predetermined load. As a result, the dummy substrate 6 and the first layer thin film 34 are firmly joined. The z stage 7 is returned to the original position. The first thin film 34 is transferred from the thin film carrier 3 side to the z stage 7 side. Similarly, the second layer of thin film 34 is laminated on the first layer of thin film 34 by transferring the same to the second layer of thin film 34 in the same manner. By repeating this, a microstructure composed of a plurality of thin films 34 is obtained. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4737375-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005295786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4650113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006341500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008140566-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004358602-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7799414-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4575651-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8667673-B2 |
| priorityDate |
1997-12-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |