abstract |
(57) [Problem] To provide a laser light generator having a wavelength close to 248 nm, high output, no toxicity, long life, and high resolution. SOLUTION: A first laser light source 1 composed of a solid-state laser that generates a first laser light having a wavelength of λ1 (= 946 nm) and a solid-state laser that generates a second laser light having a wavelength of λ2 (= 1047 nm) A second laser light source 2 comprising: The wavelength from the first and second laser beams is λ1 / λ2 / {2 Non-linear wavelength converting means 4 and 5 for obtaining (λ1 + λ2)} output laser light |