http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S57196588-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3803237c01675a891fd94223ffe2b5be |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L45-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-133 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1365 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30 |
| filingDate | 1981-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17b4b0d8a7da5bf230165f27c821c843 |
| publicationDate | 1982-12-02^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S57196588-A |
| titleOfInvention | Nonlinear element |
| abstract | PURPOSE:To obtain a highly densed insulating film as well as to contrive improvement in reliability and stabilization of the titled element by a method wherein an anodic oxidation is performed at the prescribed temperature or above. CONSTITUTION:The O2 gas of 0.1-10 Torr or thereabouts is introduced into a vacuum chamber, power of several hundreds watts is discharged and O2 plasma is generated. An oxide film is formed by bumping the oxygen radical in the O2 plasma against the surface of the metal such as Ta and the like and by coupling the metal of the surface layer and oxygen. At this time, an oxide film with excellent quality is obtained by heating up the substrate at the temperature range of 300 deg.C-500 deg.C. Then, O2 gas is introduced into the vacuum chamber, and a laser beam is scanned. The temperature of the metal surface is brought up to approximately 1,000 deg.C, the temperature on the substrate side is brought to about 300 deg.C, and an excellent oxide film (insulating film) of about 100-300Angstrom can be obtained in a microscopic time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6262333-A |
| priorityDate | 1981-05-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 |
Showing number of triples: 1 to 20 of 20.