http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S60161664-A

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filingDate 1984-02-01^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd02488ac154395440935979624f65ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32efecb20a1563c610ca3396d1965c2f
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publicationDate 1985-08-23^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-S60161664-A
titleOfInvention Tightly adhered two-dimensional image readout device
abstract PURPOSE: To realize a simple readout device, which needs no mechanical scanning mechanism, as well as to realize a tightly adhered two-dimensional image sensor, which is superior both in S/N ratio and in photo sensitivity, by a method wherein manuscript information is read out by a photo electric converting film by performing an exposure on the whole surface of the film. n CONSTITUTION: An Al film 2 is evaporated on a pyrex substrate 1 and a P type amorphous silicon film 3-1 is made to deposit on the whole surface thereof by a plasma CVD method. The Al film 2 and the P type amorphous silicon film 3-1 are combinedly worked in a stripe type by an ordinary photolithography process. After the pattern was formed, an I type amorphous silicon film 3-2 is made to deposit thereon, and moreover, an N type amorphous layer 3-3 is made to deposit thereon for forming a photoelectric converting film having a P-I-N diode structure. An ITO (In 2 O 3 -SnO 2 ) (5%) film is further evaporated on the semiconductor layer as a transparent conductive film 4 by performing an RF sputtering. A photoresist pattern is formed in such a way as to cross with the lower Al strip electrode 2 for forming an upper electrode pattern and an etch processing is simultaneously performed, including the N type amorphous silicon layer 3-3 too, for obtaining a two-dimensional photoelectric converting part. n COPYRIGHT: (C)1985,JPO&Japio
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018131638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018131638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11774707-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10991764-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017119448-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10908386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017119448-A1
priorityDate 1984-02-01^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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