http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6447022-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B23-0476 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B37-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B23-207 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B37-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B23-207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B23-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B23-047 |
| filingDate | 1987-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d52cbdfe402edf9cbc23d76e32cca980 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_825a55a0dac42f0a2721aa69ad35cbba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19d52367297d3cfba113201e24af5217 |
| publicationDate | 1989-02-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6447022-A |
| titleOfInvention | Reaction tube for heat treatment |
| abstract | PURPOSE:To manufacture the title reaction tube for heat treatment without any excessive bonding due to the thermal deformation regardless of long time operation at high temperature by a method wherein a linear reinforcement member coated with quartz glass is wound in a spiral around the outer surface of a reaction tube body made of quartz glass. CONSTITUTION:Linear Mo or W made reinforcement member 2 is drawn out in the arrow X direction inside a quartz glass made tube 1 (while specifying the space inside the tube 1 to be in vacuum atmosphere or reducing atmosphere such as H2, H2+N2 etc.) at this time, the tube 1 is heated by a heater such as a burner 4 etc., to be softened so that the wall thickness of the tube 1 may be varied to coat the reinforcement member 2 with a quartz glass 3 of 3mm in final thickness. The diameter of the reinforcement member 2 of 0.3mm in thickness is not substantially changed. The reinforcement member coated with the quartz glass tube 3 of 3mm in thickness is to be roughly or closely wound in spiral around the outer surface of quartz glass made reaction tube main body 5. At this time, if the reinforcement member 2 is arranged near the quartz glass tube 3 softened by a heater, the quartz glass will be mutually welded together. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03187937-A |
| priorityDate | 1987-08-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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