http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2003020633-A1
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0323 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0433 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
filingDate | 2002-08-28^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2004-12-16^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2003020633-A1 |
titleOfInvention | Micro device and method of manufacturing the same |
abstract | The present invention relates to a microdevice configured such that a functional element is displaced between an operating position and a retracted position by displacing a supporting means connected to a substrate, wherein one end of the supporting means is fixed to the substrate. With a fixed end, a cantilever structure having the other end on which the active element is disposed as a free end, and a spring portion formed on at least a part of the support means, the active element can be reduced with a small stress. It is configured to be capable of large displacement. |
priorityDate | 2001-08-30^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002 |
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