http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2003020633-A1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-0325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08
filingDate 2002-08-28^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2004-12-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2003020633-A1
titleOfInvention Micro device and method of manufacturing the same
abstract The present invention relates to a microdevice configured such that a functional element is displaced between an operating position and a retracted position by displacing a supporting means connected to a substrate, wherein one end of the supporting means is fixed to the substrate. With a fixed end, a cantilever structure having the other end on which the active element is disposed as a free end, and a spring portion formed on at least a part of the support means, the active element can be reduced with a small stress. It is configured to be capable of large displacement.
priorityDate 2001-08-30^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002

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