| abstract |
This is a rubber laminated sealing valve in which a fluororubber layer and an amorphous carbon film are sequentially laminated. The amorphous carbon film uses a hydrocarbon gas to supply high frequency power from a high frequency power source by a CVD plasma processing method. A rubber laminated sealing valve that is formed. This rubber laminated sealing valve has an indenter hardness of 5 GPa or more on the rubber layer surface (equivalent to Vickers hardness of about Hv500 or more, converted to ISO 14577-1 Hv (kg / m 2 ) = HIT (MPa) x 0.0926 In this case, an amorphous carbon film having a hardness of 2) is formed, and the rubber layer is non-adhesive to the counterpart material. |