http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100189646-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-935 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1990-04-16^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-06-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64e1c7495e93a7b4c61abc88775f3a70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07891eefd76f9d59db3c4f93fb35ecc |
| publicationDate | 1999-06-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100189646-B1 |
| titleOfInvention | Method and apparatus for heating / cooling semiconductor wafers |
| abstract | Solvent-free epoxy resin curable cationicly,n n n 0.01 to 5 weight percent of a triarylsulfonium salt having hexafluoro phosphate, hexafluoro arsenate or hexafluoroantimonate as an anion, based on the weight of the epoxy resin, andn n n 0.01-5% by weight of a benzyl thiolanium salt with hexa fluoro phosphate, hexafluoro arsenate or hexafluoro antimonate as an anion, based on the weight of the epoxy resin, and alson n n A reaction resin mixture, optionally comprising a standard additive, is used and the reaction resin mixture is cured by UV radiation and by heat, wherein the reaction resin mixture is cured by UV radiation and by heat. will be. |
| priorityDate | 1989-05-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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