http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100386875-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-026 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04 |
| filingDate | 1998-09-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-08-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-08-21^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100386875-B1 |
| titleOfInvention | Ion implanter electron shower having enhanced secondary electron emission |
| abstract | A plasma enhanced electron shower 62 for ion implantation system 10 is provided that includes a target 64 provided with a chamber 84 at least partially defined by a replaceable graphite liner 84. The filament assembly 67 attached to the target generates and directs primary electrons towards the surface provided by the graphite liner, which is biased to a negative negative voltage of about -10 V (approximately -6 V) As a result of the colliding primary electrons, it ensures that the secondary electrons emitted therefrom have a uniformly low energy. The filament assembly 67 includes a filament 68 for thermally emitting primary electrons, a biased (-300 V) filament electrode 70 for focusing the emitted primary electrons, and a focused primary A grounded extraction hole 72 for extracting electrons towards the graphite surface 118. A gas nozzle 77 attached to the target 64 guides the feed into the chamber of gas molecules to be ionized by the primary electrons. The direction of the nozzle is set relative to the filament assembly 67 to maximize the ionization rate of the gas molecules. |
| priorityDate | 1997-09-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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